US Patent Issued to CANON on Sept. 30 for "Measurement method, imprint apparatus, and article manufacturing method" (Japanese Inventors)

ALEXANDRIA, Va., Sept. 30 -- United States Patent no. 12,429,764, issued on Sept. 30, was assigned to CANON K.K. (Tokyo).

"Measurement method, imprint apparatus, and article manufacturing method" was invented by Shinichi Shudo (Saitama, Japan) and Masataka Yasukawa (Tochigi, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present invention provides a measurement method including while driving a measurement target region of a surface of a substrate in a first direction with respect to a measurement unit, obtaining first measurement information indicating a height of the measurement target region in each of a plurality of first measurement lines parallel to the first direction and different from each ...