US Patent Issued to CANON on Sept. 30 for "Foreign particle removing method, formation method, article manufacturing method, foreign particle removing apparatus, and system" (Japanese Inventor)

ALEXANDRIA, Va., Sept. 30 -- United States Patent no. 12,427,552, issued on Sept. 30, was assigned to CANON K.K. (Tokyo).

"Foreign particle removing method, formation method, article manufacturing method, foreign particle removing apparatus, and system" was invented by Hisanobu Azuma (Kanagawa, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present invention provides a foreign particle removing method of removing a foreign particle on a first member, comprising: supplying a composition to a supply region on the first member; setting a target region wider than the supply region on the first member, and pressing a second member against the composition supplied on the first member in the supplying; cu...