US Patent Issued to CANON on Sept. 30 for "Detection apparatus, lithography apparatus, and article manufacturing method" (Japanese Inventors)

ALEXANDRIA, Va., Sept. 30 -- United States Patent no. 12,429,795, issued on Sept. 30, was assigned to CANON K.K. (Tokyo).

"Detection apparatus, lithography apparatus, and article manufacturing method" was invented by Ryo Nakayama (Tochigi, Japan), Takahiro Matsumoto (Tochigi, Japan), Takafumi Miyaharu (Tochigi, Japan), Hironobu Fujishima (Saitama, Japan) and Yuichi Fujita (Tochigi, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A detection apparatus includes an image sensing device having an image sensing plane including a first periodic structure; and an optical system configured to illuminate a detection target including a second periodic structure different from the first periodic structure, and for...