ALEXANDRIA, Va., Oct. 8 -- United States Patent no. 12,436,471, issued on Oct. 7, was assigned to CANON K.K. (Tokyo).
"Control apparatus, lithography apparatus, and article manufacturing method" was invented by Mitsuhide Nishimura (Tochigi, Japan), Junichi Motojima (Tochigi, Japan) and Tsutomu Terao (Tochigi, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A control apparatus for performing position control of a moving object is provided. The apparatus includes a feedforward controller configured to perform feedforward control by giving a feedforward manipulated variable to the moving object. In a case that a duration of the feedforward control exceeds a predetermined time, the feedforward controller co...