ALEXANDRIA, Va., Oct. 28 -- United States Patent no. 12,449,739, issued on Oct. 21, was assigned to CANON K.K. (Tokyo).
"Imprint apparatus and method of manufacturing article" was invented by Ryosuke Tsutsumi (Utsunomiya, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "The present invention provides an imprint apparatus that forms an imprint material pattern on a substrate by using a mold, comprising: a discharge unit on which a plurality of discharge outlets configured to discharge an imprint material are arranged; a measurement unit configured to measure a relative tilt between the discharge unit and the substrate; and a control unit configured to control a process of causing the discharge unit to dis...