ALEXANDRIA, Va., Oct. 28 -- United States Patent no. 12,447,666, issued on Oct. 21, was assigned to CANON K.K. (Tokyo).
"Imprint apparatus and article manufacturing method" was invented by Naoki Maruyama (Tochigi, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "An imprint apparatus according to the present invention includes a controller configured to perform a contacting step of moving at least one of a mold holding unit and a substrate holding unit by at least one of a mold driving unit and a substrate driving unit such that a mold and an imprint material on a substrate surface are brought into contact with each other, an obtaining step of obtaining a driving force in a first direction parallel to the...