ALEXANDRIA, Va., Oct. 28 -- United States Patent no. 12,447,667, issued on Oct. 21, was assigned to CANON K.K. (Tokyo).
"Imprint apparatus and article manufacturing method" was invented by Shinichi Shudo (Saitama, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "The present invention provides an imprint apparatus including a holding member configured to hold the mold, a spring member configured to connect the holding member to a base unit that supports the holding member, a driving unit provided between the holding member and the base unit and configured to drive the holding member in a vertical direction with respect to the base unit, and a regulating surface configured to regulate, in a vertical range ...