ALEXANDRIA, Va., Oct. 28 -- United States Patent no. 12,449,727, issued on Oct. 21, was assigned to CANON K.K. (Tokyo).
"Imprint apparatus, manufacturing method for article, and computer program" was invented by Hirotoshi Torii (Tochigi, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "[Problem] The provision of an imprint apparatus that is beneficial in improving the overlap precision of a mold and resin on a substrate.[Method for Solving the Problem] In an imprint apparatus, which is configured so as to transfer a pattern from a mold onto a resin surface by pressing the mold onto the resin that is disposed on the substate surface, has a magnification correction mechanism including actuators for applyin...