US Patent Issued to CANON on Nov. 4 for "Illumination optical system, exposure apparatus and method of manufacturing article" (Japanese Inventor)

ALEXANDRIA, Va., Nov. 6 -- United States Patent no. 12,461,446, issued on Nov. 4, was assigned to CANON K.K. (Tokyo).

"Illumination optical system, exposure apparatus and method of manufacturing article" was invented by Daisuke Kobayashi (Tochigi, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present invention provides an illumination optical system for illuminating an object, comprising: a first light-transmissive member and a second light-transmissive member, and a control unit configured to control drive of the first light-transmissive member and the second light-transmissive member, therein, while the control unit drives the first light-transmissive member such that an incident angle of light ...