US Patent Issued to Canon on Nov. 25 for "Object alignment method, imprint method, article manufacturing method, detection apparatus, imprint apparatus, mold, and substrate" (Japanese Inventor)

ALEXANDRIA, Va., Nov. 25 -- United States Patent no. 12,481,228, issued on Nov. 25, was assigned to Canon K.K. (Tokyo).

"Object alignment method, imprint method, article manufacturing method, detection apparatus, imprint apparatus, mold, and substrate" was invented by Kenji Yaegashi (Tochigi, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "An alignment method of aligning a first object and a second object includes detecting a moire fringe formed by a mark of the first object and a mark of the second object by using a detection unit, detecting an evaluation mark for correcting a detection result of the moire fringe, by the detection unit, and acquiring a detection result of the evaluation mark, determini...