US Patent Issued to CANON on Nov. 11 for "Simulation method, simulation apparatus, computer readable medium, film forming apparatus, and method of manufacturing article" (Japanese Inventors)

ALEXANDRIA, Va., Nov. 11 -- United States Patent no. 12,468,867, issued on Nov. 11, was assigned to CANON K.K. (Tokyo).

"Simulation method, simulation apparatus, computer readable medium, film forming apparatus, and method of manufacturing article" was invented by Shintaro Narioka (Tochigi, Japan), Yuichiro Oguchi (Tokyo), Sentaro Aihara (Tochigi, Japan) and Ken Katsuta (Saitama, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A simulation method is performed for simulating a behavior of a curable composition in a film forming apparatus that brings the curable composition arranged on a first member and a second member into contact with each other, and forms a film of the curable composition on the first...