ALEXANDRIA, Va., June 17 -- United States Patent no. 12,313,977, issued on May 27, was assigned to CANON K.K. (Tokyo).
"Film formation device, film formation method, and article manufacturing method" was invented by Hiroshi Kurosawa (Tochigi, Japan) and Toshiki Ito (Kanagawa, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A film formation device for forming a film of a composition on the substrate by irradiating the composition on the substrate with light, includes an optical modulation unit for forming a distribution of an integrated light amount of the light on the substrate, and a control unit for controlling the optical modulation unit, in which the control unit controls the distribution of the int...