US Patent Issued to CANON on May 20 for "Processing apparatus, measurement apparatus, lithography apparatus, method of manufacturing article, model, processing method, measurement method, generation method, and generation apparatus" (Japanese Inventors)

ALEXANDRIA, Va., June 16 -- United States Patent no. 12,307,643, issued on May 20, was assigned to CANON K.K. (Tokyo).

"Processing apparatus, measurement apparatus, lithography apparatus, method of manufacturing article, model, processing method, measurement method, generation method, and generation apparatus" was invented by Satoru Jimbo (Tochigi, Japan), Yoshio Suzaki (Tochigi, Japan), Kazuhiko Mishima (Tochigi, Japan) and Noburu Takakura (Tochigi, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present invention provides a processing apparatus comprising: a generator configured to generate, based on image data of a measurement target, position information of the measurement target in a first dire...