US Patent Issued to CANON on May 20 for "Light source apparatus, lithography apparatus, and article manufacturing" (Japanese Inventor)

ALEXANDRIA, Va., June 16 -- United States Patent no. 12,306,387, issued on May 20, was assigned to CANON K.K. (Tokyo).

"Light source apparatus, lithography apparatus, and article manufacturing" was invented by Takayuki Yamaguchi (Tochigi, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A light source apparatus configured to emit light includes a condenser unit configured to reflect light from a light source and to condense the light on a condensing point, a light shielding unit disposed on an optical path of the light from the condenser unit, and a reflector unit disposed between the condenser unit and the light shielding unit and configured to reflect the light from the condenser unit. The reflector un...