ALEXANDRIA, Va., June 16 -- United States Patent no. 12,304,121, issued on May 20, was assigned to CANON K.K. (Tokyo).
"Imprint apparatus and article manufacturing method" was invented by Yushi Yamakawa (Tochigi, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "The imprint apparatus according to the present invention includes a mold holding unit configured to be movable with holding a mold, a moving body configured to be movable with holding a substrate, a detecting unit configured to detect a position of mold-side marks formed in a pattern region of the mold and a position of substrate-side marks formed in a shot region on the substrate, a measuring unit configured to measure a relative position between...