US Patent Issued to CANON on May 13 for "Apparatus including a substrate chuck, a dispenser, and a planarization head and methods of using the same" (Texas Inventors)

ALEXANDRIA, Va., June 12 -- United States Patent no. 12,300,522, issued on May 13, was assigned to CANON K.K. (Tokyo).

"Apparatus including a substrate chuck, a dispenser, and a planarization head and methods of using the same" was invented by Ozkan Ozturk (Round Rock, Texas) and Alireza Aghili (Austin, Texas).

According to the abstract* released by the U.S. Patent & Trademark Office: "An apparatus includes a first substrate chuck configured to hold a first substrate, a second substrate chuck configured to hold a second substrate, and a dispenser configured to dispense a formable material onto the first substrate while the first substrate overlies the first substrate chuck and to dispensing the formable material onto the second substrate ...