US Patent Issued to CANON on March 11 for "Control apparatus, imprint apparatus, and method of manufacturing article" (Japanese Inventors)

ALEXANDRIA, Va., March 12 -- United States Patent no. 12,246,482, issued on March 11, was assigned to CANON K.K. (Tokyo).

"Control apparatus, imprint apparatus, and method of manufacturing article" was invented by Ryo Nawata (Tochigi, Japan), Hiroyuki Sekiguchi (Tochigi, Japan), Takashi Shibayama (Tochigi, Japan) and Yuma Onizawa (Tochigi, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A control apparatus which controls a force applied to an object, includes a driver configured to apply the force to the object, an estimator configured to estimate, based on information related to a state of the object, an estimated value of a disturbance force to be applied to the object, a corrector configured to corre...