US Patent Issued to CANON on June 24 for "Measurement apparatus, lithography apparatus, and article manufacturing method" (Japanese Inventors)

ALEXANDRIA, Va., June 25 -- United States Patent no. 12,339,595, issued on June 24, was assigned to CANON K.K. (Tokyo).

"Measurement apparatus, lithography apparatus, and article manufacturing method" was invented by Satoru Jimbo (Tochigi, Japan) and Kazuhiko Mishima (Tochigi, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A measurement apparatus that measures position information of a measurement target is provided. The apparatus includes a scope configured to generate an image by capturing an image of the measurement target, and a processor configured to obtain position information of the measurement target based on the image. The processor is configured to generate a plurality of image components us...