ALEXANDRIA, Va., June 25 -- United States Patent no. 12,337,509, issued on June 24, was assigned to Canon K.K. (Tokyo).
"Imprint apparatus, imprint method, and method of manufacturing article" was invented by Hiroyuki Koide (Tochigi, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "An imprint apparatus which performs imprint processing by using a mold having a protruding portion and by bringing the protruding portion into contact with a composition on a substrate, the imprint apparatus comprising: a first illumination unit configured to emit light that cures the composition; a second illumination unit configured to emit light that cures the composition; and a control unit configured to perform control pr...