ALEXANDRIA, Va., June 19 -- United States Patent no. 12,330,349, issued on June 17, was assigned to CANON K.K. (Tokyo).
"Imprint method, imprint apparatus, and method of manufacturing article" was invented by Yoshihiro Matsuoka (Tochigi, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "The present invention provides an imprint method of forming a pattern of an imprint material on a substrate using a mold, comprising: performing preliminary curing in which the imprint material is cured to a first target hardness by irradiating the imprint material with first light, in order to execute alignment between the mold and the substrate; and performing, after the alignment, main curing in which the imprint materi...