US Patent Issued to CANON on June 17 for "Detection device, correction device, processing device, and article manufacturing method" (Japanese Inventors)

ALEXANDRIA, Va., June 19 -- United States Patent no. 12,332,044, issued on June 17, was assigned to CANON K.K. (Tokyo).

"Detection device, correction device, processing device, and article manufacturing method" was invented by Yukihiro Inoue (Tochigi, Japan) and Hiroyuki Morimoto (Tochigi, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "Provided is a detection device which is able to accurately detect position information on an optical axis of laser light and reduce a measurement error, including a first split unit configured to split laser light output from a light source into a plurality of light beams, a detection unit configured to detect a position of each of the plurality of light beams, a light g...