ALEXANDRIA, Va., July 9 -- United States Patent no. 12,353,127, issued on July 8, was assigned to CANON K.K. (Tokyo).
"Imprint apparatus, imprint method and article manufacturing method" was invented by Yusuke Kaneto (Tochigi, Japan) and Masato Shichijo (Tochigi, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "The present invention provides an imprint apparatus for performing an imprint process of forming a pattern of an imprint material in a plurality of shot regions on a substrate using a mold, including a control unit configured to perform a first operation of, while driving the substrate such that a target shot region in the plurality of shot regions is located at a first position facing the mold, s...