US Patent Issued to Canon on July 29 for "Imprint apparatus and product manufacturing method" (Japanese Inventors)

ALEXANDRIA, Va., July 30 -- United States Patent no. 12,372,866, issued on July 29, was assigned to Canon K.K. (Tokyo).

"Imprint apparatus and product manufacturing method" was invented by Kenichi Kobayashi (Utsunomiya, Japan) and Tatsuya Arakawa (Saitama, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "An imprint apparatus executes imprint processing of curing imprint material in a state in which the imprint material supplied onto a substrate and a mold are in contact with each other. The imprint apparatus includes a modulator configured to modulate incident light, a first optical system configured to guide first light from a first light source to the modulator, and second light from a second light sou...