US Patent Issued to CANON on July 22 for "Detection apparatus, detection method, exposure apparatus and article manufacturing method" (Japanese Inventors)

ALEXANDRIA, Va., July 23 -- United States Patent no. 12,366,812, issued on July 22, was assigned to CANON K.K. (Tokyo).

"Detection apparatus, detection method, exposure apparatus and article manufacturing method" was invented by Hironori Maeda (Saitama, Japan), Ryo Takai (Tochigi, Japan) and Masakatsu Yanagisawa (Tochigi, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A detection apparatus including a plurality of detection systems arranged spaced apart from each other so as to detect, of a plurality of marks provided on an object held by a stage, marks different from each other, and a processing unit configured to perform a first process of obtaining a first detection value by detecting the plurality ...