ALEXANDRIA, Va., Jan. 28 -- United States Patent no. 12,533,842, issued on Jan. 27, was assigned to CANON K.K. (Tokyo).
"Imprint apparatus" was invented by Masayoshi Fujimoto (Tochigi, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "The imprint apparatus according to the present invention causes a supplying unit to supply an imprint material onto at least a first region in a predetermined shot region on a substrate, causes an energy supplying unit to supply energy to the imprint material on the first region so as to increase a degree of polymerization of the imprint material on the first region, causes a moving unit to move at least one of a mold and the substrate such that a pattern region formed on th...