ALEXANDRIA, Va., Jan. 20 -- United States Patent no. 12,529,955, issued on Jan. 20, was assigned to CANON K.K. (Tokyo).
"Imprint apparatus and article manufacturing method" was invented by Tomohiro Harayama (Tochigi, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "An imprint apparatus for performing an imprint process of forming a pattern of an imprint material on a substrate using a mold, including a control unit configured to control a process concerning inspection of the imprint process, wherein the imprint process includes an arrangement process including stage driving of driving a stage between a first position below the mold and a second position below a dispenser, and in a case where a plurality ...