US Patent Issued to CANON on Jan. 13 for "Determination method, determination apparatus, information processing method, storage medium, information processing apparatus, lithographic apparatus, and method for manufacturing article" (Japanese Inventors)

ALEXANDRIA, Va., Jan. 13 -- United States Patent no. 12,523,939, issued on Jan. 13, was assigned to CANON K.K. (Tokyo).

"Determination method, determination apparatus, information processing method, storage medium, information processing apparatus, lithographic apparatus, and method for manufacturing article" was invented by Shuji Sato (Tochigi, Japan) and Satoshi Sugiura (Tochigi, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A determination method includes measuring first relative positions as a first measurement, measuring second relative positions as a second measurement, and determining presence or absence of an abnormality. The first relative positions are relative positions between members corr...