ALEXANDRIA, Va., Feb. 19 -- United States Patent no. 12,228,855, issued on Feb. 18, was assigned to CANON K.K. (Tokyo).
"Imprint apparatus, imprint method, article manufacturing method, and storage medium" was invented by Kenji Yoshida (Tochigi, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "An imprint apparatus capable of stably maintaining the concentration of gas supplied for imprint processing is provided even after the moving direction of a substrate is changed by comprising a gas supply port, and when the moving direction or the substrate is changed so that a next target shot region is to be imprinted, the substrate is moved to a position in the order of the next target shot region, the gas suppl...