ALEXANDRIA, Va., Feb. 11 -- United States Patent no. 12,547,797, issued on Feb. 10, was assigned to CANON K.K. (Tokyo).
"Simulation apparatus, control method of simulation apparatus, and computer-readable storage medium" was invented by Ken Katsuta (Saitama, Japan) and Yuichiro Oguchi (Tokyo).
According to the abstract* released by the U.S. Patent & Trademark Office: "A simulation apparatus predicts a behavior of a curable composition in a formation process in which the curable composition arranged on a shot region of a substrate and a mold are brought into contact with each other to form a film of the curable composition on the shot region. The apparatus includes a processor configured to obtain the behavior of the curable composition by...