US Patent Issued to Canon on Feb. 10 for "Planarization process, apparatus and method of manufacturing an article" (Texas Inventors)

ALEXANDRIA, Va., Feb. 11 -- United States Patent no. 12,550,688, issued on Feb. 10, was assigned to Canon K.K. (Tokyo).

"Planarization process, apparatus and method of manufacturing an article" was invented by Steven C. Shackleton (Austin, Texas) and Seth J. Bamesberger (Austin, Texas).

According to the abstract* released by the U.S. Patent & Trademark Office: "A planarization system is provided. The planarization system includes a first substrate chuck which holds the substrate during a planarization step, and a second substrate chuck which holds the substrate with a non-flat configuration during a separation step."

The patent was filed on Dec. 29, 2021, under Application No. 17/564,710.

*For further information, including images, char...