US Patent Issued to Canon on Feb. 10 for "Information processing apparatus, inspection method, storage medium, exposure apparatus, determination method, and article manufacturing method" (Japanese Inventor)

ALEXANDRIA, Va., Feb. 11 -- United States Patent no. 12,547,068, issued on Feb. 10, was assigned to Canon K.K. (Tokyo).

"Information processing apparatus, inspection method, storage medium, exposure apparatus, determination method, and article manufacturing method" was invented by Mitsuru Inose (Ibaraki, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "An information processing apparatus configured to inspect a developed state of a substrate includes an inspection unit configured to input a captured image of a developed second substrate to a learning model to acquire inspection data that include information indicating a second developed state of the second substrate. The learning model is obtained by lea...