ALEXANDRIA, Va., Feb. 11 -- United States Patent no. 12,547,069, issued on Feb. 10, was assigned to CANON K.K. (Tokyo).
"Imprint apparatus, imprint method and article manufacturing method" was invented by Yoshihiro Matsuoka (Tochigi, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "An imprint apparatus including a control unit configured to obtains data for estimating a fluctuation of a positional shift between a mold and a substrate occurring during a contact step, and when performing an imprint process on the substrate, obtains an estimation value by estimating the positional shift occurring during the contact step from the positional shift measured by a measurement unit at a reference time during the ...