ALEXANDRIA, Va., Feb. 11 -- United States Patent no. 12,547,070, issued on Feb. 10, was assigned to CANON K.K. (Tokyo).
"Imprint apparatus, imprint method, and article manufacturing method" was invented by Toshiaki Ando (Tokyo).
According to the abstract* released by the U.S. Patent & Trademark Office: "An imprint apparatus in which contamination in an apparatus due to an uncured material or the like can be minimized is provided. The imprint apparatus includes: a first irradiation unit configured to irradiate an imprint material on a substrate with light for performing curing in a state in which the imprint material is brought into contact with a pattern portion having a concave and convex pattern formed in a mold; and a second irradiatio...