US Patent Issued to CANON on Dec. 9 for "Imprint device, imprint method, storage medium, and article manufacturing method" (Japanese Inventors)

ALEXANDRIA, Va., Dec. 9 -- United States Patent no. 12,491,679, issued on Dec. 9, was assigned to CANON K.K. (Tokyo).

"Imprint device, imprint method, storage medium, and article manufacturing method" was invented by Yosuke Murakami (Tochigi, Japan), Kazuki Nakagawa (Tochigi, Japan) and Masahiro Tamura (Tochigi, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "In order to provide an imprint device and the like that can efficiently maintain a concentration of a gas when imprinting is sequentially performed, the imprint device includes: a mold holding unit configured to a mold; a substrate holding unit configured to holding a substrate; a gas supply unit configured to supply a gas to an imprint space betwe...