ALEXANDRIA, Va., Dec. 31 -- United States Patent no. 12,508,766, issued on Dec. 30, was assigned to CANON K.K. (Tokyo).
"Imprint apparatus and article manufacturing method" was invented by Masahiro Tamura (Tochigi, Japan), Tosiya Asano (Tochigi, Japan) and Atsushi Kimura (Saitama, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "An imprint apparatus that performs an imprint process of forming a pattern of an imprint material on a substrate using a mold, the apparatus including a control unit configured to control a mold driving unit and a substrate driving unit, and the imprint process including curing the imprint material, and releasing the mold from the cured imprint material, wherein the control unit ...