US Patent Issued to CANON on Dec. 2 for "Substrate transportation hand, substrate transportation system, storage medium, and method for producing article" (Japanese Inventor)

ALEXANDRIA, Va., Dec. 2 -- United States Patent no. 12,489,012, issued on Dec. 2, was assigned to CANON K.K. (Tokyo).

"Substrate transportation hand, substrate transportation system, storage medium, and method for producing article" was invented by Osamu Yasunobe (Tochigi, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate transportation hand for transporting a substrate includes: at least one first holding part provided on an upper surface side of the substrate transportation hand capable of sucking and holding the substrate; at least one second holding part provided on a lower surface side of the substrate transportation hand capable of sucking and holding the substrate; and a drive unit for ...