ALEXANDRIA, Va., Dec. 2 -- United States Patent no. 12,487,529, issued on Dec. 2, was assigned to Canon K.K. (Tokyo).
"Exposing apparatus and method for manufacturing article" was invented by Masato Homma (Tochigi, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "An exposing apparatus for exposing a substrate to transfer a pattern formed on an original to the substrate by using exposure light from a light source includes a projecting optical system configured to guide the exposure light having passed through the original to the substrate, a measuring unit configured to measure a position of the substrate in a first direction perpendicular to a substrate surface of the substrate by making measurement ligh...