US Patent Issued to Canon on Dec. 16 for "System and method for generating control values for overlay control of an imprint tool" (Texas Inventors)

ALEXANDRIA, Va., Dec. 16 -- United States Patent no. 12,498,634, issued on Dec. 16, was assigned to Canon K.K. (Tokyo).

"System and method for generating control values for overlay control of an imprint tool" was invented by Nilabh K. Roy (Austin, Texas), Mario Johannes Meissl (Austin, Texas) and Anshuman Cherala (Austin, Texas).

According to the abstract* released by the U.S. Patent & Trademark Office: "Some devices, systems, and methods obtain a set of relationship values, wherein the set of relationship values indicates relationships between control values for an imprint apparatus and corresponding overlay corrections; and estimate a set of control values based on a constrained optimization that uses the set of relationship values such...