US Patent Issued to CANON on Aug. 19 for "Simulation method, simulation apparatus, film forming apparatus, article manufacturing method, and non-transitory computer-readable storage medium" (Japanese Inventors)

ALEXANDRIA, Va., Aug. 20 -- United States Patent no. 12,393,183, issued on Aug. 19, was assigned to CANON K.K. (Tokyo).

"Simulation method, simulation apparatus, film forming apparatus, article manufacturing method, and non-transitory computer-readable storage medium" was invented by Tetsuji Okada (Saitama, Japan) and Yuichiro Oguchi (Tokyo).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present invention provides a simulation method of predicting a behavior of a composition in processing of bringing the composition arranged on a first member into contact with a second member and forming a film of the composition on the first member, comprising: predicting the behavior of the composition in the processing...