ALEXANDRIA, Va., Aug. 20 -- United States Patent no. 12,390,978, issued on Aug. 19, was assigned to CANON K.K. (Tokyo).
"Imprint method and method for manufacturing article" was invented by Tomomi Funayoshi (Tokyo) and Ryosuke Hamamoto (Tokyo).
According to the abstract* released by the U.S. Patent & Trademark Office: "In order to realize an imprint method capable of reducing a drawback caused by protrusion of an imprint material, the imprint method includes a first pattern forming process of bringing a mold into contact with an imprint material on a first pattern forming region on a substrate; a first exposure process of exposing an imprint material on the first pattern forming region and making an amount of exposure for the imprint mate...