US Patent Issued to CANON on Aug. 12 for "Imprint apparatus, method of manufacturing article, planarized layer forming apparatus, information processing apparatus, and determination method" (Japanese Inventor)

ALEXANDRIA, Va., Aug. 12 -- United States Patent no. 12,384,077, issued on Aug. 12, was assigned to CANON K.K. (Tokyo).

"Imprint apparatus, method of manufacturing article, planarized layer forming apparatus, information processing apparatus, and determination method" was invented by Sentaro Aihara (Utsunomiya, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "An imprint apparatus that brings a mold and an imprint material on a substrate into contact with each other to form a pattern of the imprint material on the substrate is provided. The apparatus comprises a supplying unit configured to supply the imprint material to the substrate, and a control unit configured to control the supplying unit in accorda...