US Patent Issued to Canon on Aug. 12 for "Exposure apparatus, control method of exposure apparatus, information processing apparatus, information processing method, and article manufacturing method" (Japanese Inventor)

ALEXANDRIA, Va., Aug. 12 -- United States Patent no. 12,386,272, issued on Aug. 12, was assigned to Canon K.K. (Tokyo).

"Exposure apparatus, control method of exposure apparatus, information processing apparatus, information processing method, and article manufacturing method" was invented by Jun Moizumi (Tochigi, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "An apparatus includes a control unit configured to control an adjustment unit for adjusting imaging characteristics of an optical system. In a period spanning a plurality of lots, the control unit measures imaging characteristics of the optical system, and decides a prediction coefficient in a prediction formula to fit the prediction formula to m...