ALEXANDRIA, Va., June 9 -- United States Patent no. 12,285,904, issued on April 29, was assigned to CANON K.K. (Tokyo).
"Imprint apparatus, imprint method, and article manufacturing method" was invented by Takehiko Ueno (Tochigi, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "An imprint apparatus that transfers a pattern of a mold to an imprint material on a substrate, includes: a mold having a pattern region in which the pattern is formed; a substrate holding unit having a substrate mounting surface on which the substrate is mounted; a driving unit configured to drive the mold and press the mold against the substrate coated with an imprint material at three or more positions; and a control unit config...