US Patent Issued to Canon on April 22 for "Planarization apparatus, planarization process, and method of manufacturing an article" (Texas Inventors)

ALEXANDRIA, Va., June 6 -- United States Patent no. 12,283,522, issued on April 22, was assigned to Canon K.K. (Tokyo).

"Planarization apparatus, planarization process, and method of manufacturing an article" was invented by Seth J. Bamesberger (Austin, Texas), Ozkan Ozturk (Round Rock, Texas), Christopher Ellis Jones (Austin, Texas) and Se-Hyuk Im (Austin, Texas).

According to the abstract* released by the U.S. Patent & Trademark Office: "A superstrate for planarizing a substrate. The superstrate includes a body having a first side having a contact surface and a second side having a central portion and a peripheral portion surrounding the central portion. The peripheral portion includes a recessed region."

The patent was filed on Nov. 1...