US Patent Issued to Canon Anelva on May 20 for "Load lock device" (Japanese Inventors)

ALEXANDRIA, Va., June 16 -- United States Patent no. 12,308,254, issued on May 20, was assigned to Canon Anelva Corp. (Kawasaki, Japan).

"Load lock device" was invented by Jun Miura (Hachioji, Japan), Naoya Fukuda (Chofu, Japan), Shuji Kumagai (Tama, Japan), Shinji Takagi (Tama, Japan), Tetsuro Toda (Machida, Japan), Hidetoshi Shimokawa (Fuchu, Japan), Satoshi Negishi (Hachioji, Japan), Satoshi Nomura (Tama, Japan) and Junya Soeda (Yokohama, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A load lock device includes a load lock chamber including a first conveyance port connected to a transfer chamber connected to a reduced-pressure processing device, and a second conveyance port connected to a loader ch...