ALEXANDRIA, Va., Nov. 11 -- United States Patent no. 12,467,737, issued on Nov. 11, was assigned to Camtek Ltd. (Migdal Ha'emek, Israel).
"Self-referencing interferometric microscope" was invented by Boris Ferdman (Adi, Israel) and Tomer Gilad (Kiryat Tivon, Israel).
According to the abstract* released by the U.S. Patent & Trademark Office: "A self-referencing interferometric microscope uses near-common-path, common component beam separators to produce two beams that illuminate the sample at different angles. Two return beams collected from the sample interfere at the image plane to produce an interferometric image of the sample comprising fringes across the image. The image can be processed to determine the topography of the sample."
Th...