ALEXANDRIA, Va., June 4 -- United States Patent no. 12,320,757, issued on June 3, was assigned to CAMTEK LTD (Migdal Ha'emek, Israel).
"Semiconductor inspection tool system and method for wafer edge inspection" was invented by Carmel Yehuda Drillman (Haifa, Israel), Moshe Edri (Kiryat Tivon, Israel), Menachem Regensburger (Shimshit, Israel), Baheej Bathish (Haifa, Israel) and Mordi Dahan (Kiryat Bialik, Israel).
According to the abstract* released by the U.S. Patent & Trademark Office: "A semiconductor inspection tool system is disclosed. The system comprises a first illumination setup for generating at least one first illumination radiation and for directing the at least one first illumination radiation to at least one bonding region non...