ALEXANDRIA, Va., June 4 -- United States Patent no. 12,322,626, issued on June 3, was assigned to Bum Je Woo (Seongnam, South Korea) and PICO & TERA Co. LTD. (Suwon, South Korea).
"Container for storing wafer" was invented by Bum Je Woo (Seongnam, South Korea), Seok Mun Yoon (Suwon, South Korea), Jang Heo (Suwon, South Korea) and Young Chul Kim (Yongin, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "The present invention relates to a container for storing a wafer, particularly to a container for storing a wafer in which a plurality of purging areas is vertically partitioned in the interior of a storage chamber, and a purge gas is sprayed into the plurality of purging areas, thereby allowing not o...