ALEXANDRIA, Va., June 12 -- United States Patent no. 12,300,528, issued on May 13, was assigned to Brooks Automation US LLC (Chelmsford, Mass.).
"Substrate transport apparatus" was invented by Robert T. Caveney (Windham, N.H.), Ulysses Gilchrist (Reading, Mass.) and Alexander Krupyshev (Chelmsford, Mass.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A transfer apparatus including a frame, multiple arms connected to the frame, each arm having an end effector and an independent drive axis for extension and retraction of the respective arm with respect to other ones of the multiple arms, a linear rail defining a degree of freedom for the independent drive axis for extension and retraction of at least one arm, ...