ALEXANDRIA, Va., Feb. 11 -- United States Patent no. 12,544,908, issued on Feb. 10, was assigned to BROOKS AUTOMATION US LLC (Chelmsford, Mass.).
"Substrate transport apparatus with independent accessory feedthrough" was invented by Sean E Plaisted (Newburyport, Mass.), Leigh F Sharrock (Londonderry, N.H.) and Chris Aitken (Berkshire, Great Britain).
According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate transport apparatus including a frame, a substrate transport arm connected to the frame, the substrate transport arm having an end effector, and a drive section having at least one motor coupled to the substrate transport arm, wherein the at least one motor defines a kinematic portion of the drive section ...